Location: Nano Fabrication Facility
The NFF has an Nanometrology AFM for accurate, precise, and reproducible measurements, featuring a non-contact mode for preserving tip sharpness, fast defect imaging, and a decoupled XY scanning system for 3D measurements.
Description
Park NX20 Atomic Force Microscope with the following specifications:
- Z range of up to 15 um.
- XY Scanner with a maximum range of 100 um by 100 um.
- Vacuum and magnetic holder for small samples and 2″, 4″ and 6″ wafers.
Additional information
| Building | i22 |
|---|---|
| Technology / Application | AFM, Material topology, Surface Topography |
